Polymers for microelectronics
Open Access
- 1 September 2001
- journal article
- review article
- Published by Elsevier in Materials Today
- Vol. 4 (5) , 22-33
- https://doi.org/10.1016/s1369-7021(01)80253-4
Abstract
No abstract availableKeywords
This publication has 37 references indexed in Scilit:
- Poly(arylene ether)s containing heterocyclic unitsPublished by Springer Nature ,2005
- Polymers from BenzocyclobutenesPublished by Springer Nature ,2005
- Chemical mechanical polishing of polymer filmsJournal of Electronic Materials, 1998
- Low-Dielectric-Constant Materials for ULSI Interlayer-Dielectric ApplicationsMRS Bulletin, 1997
- Metal catalyzed polycondensation reactionsPublished by Walter de Gruyter GmbH ,1995
- High performance thermoplasticsDie Angewandte Makromolekulare Chemie, 1986
- Polyimide insulators for multilevel interconnectionsThin Solid Films, 1981
- A New Transistor with Two‐Level Metal ElectrodesJournal of the Electrochemical Society, 1977
- Linear PolyquinoxalinesJournal of Macromolecular Science, Part C: Polymer Reviews, 1971
- Phenyl‐substituted polyquinoxalinesJournal of Polymer Science Part A-1: Polymer Chemistry, 1967