Electric and Pyroelectric Behaviors of PbTiO3 Thin Films Formed by an Excimer Laser Ablation Technique

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Abstract
Ferroelectric PbTiO3 thin films have been formed on base electrodes of platinum by an ArF excimer laser ablation technique. X-ray diffraction patterns of the films show c-axis orientation with a rocking angle of 0.8°-0.5° under the cooling rate conditions of less than -75°C/min. These films exhibit ferroelectric hysteresis loops. The PbTiO3 film, formed at 550°C in O2 pressure of 100 mTorr, has a dielectric constant, coercive field and remnant polarization of 130, 280 kV/cm and 80 µC/cm2, respectively. These values are too large but they are rather similar to the values of theoretical data. Voltage responsivities of these films are 1000-1500 V/W at the frequency of 10 Hz even without poling treatment.