Deposition of molybdenum nitride thin films by r.f. reactive magnetron sputtering
- 29 February 1996
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 79 (1-3) , 50-54
- https://doi.org/10.1016/0257-8972(95)02425-5
Abstract
No abstract availableKeywords
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