13.56MHz hollow cathode jet matrix plasma source for large area surface coating
- 28 February 1999
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 112 (1-3) , 366-372
- https://doi.org/10.1016/s0257-8972(98)00778-6
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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