Micromechanical relay with electrostatic actuation
- 1 January 1997
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 1165-1168 vol.2
- https://doi.org/10.1109/sensor.1997.635412
Abstract
Three variants of electrostatically driven microrelays are reported. The concepts of these microrelays are a cantilever beam, a fixed-fixed beam and a torsion beam with a double contact configuration. Because of the complete fabrication by surface micromachining technology, there is no need for a chip bonding process. This paper reports on the device concept, fabrication and performance of the microrelay.Keywords
This publication has 2 references indexed in Scilit:
- An Electrostatfcally Actuated Micro-relayPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Fabrication of electrostatic nickel microrelays by nickel surface micromachiningPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005