Ultraviolet/ozone cleaning of carbon-contaminated optics
- 1 August 1993
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 32 (22) , 4114-4116
- https://doi.org/10.1364/ao.32.004114
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 5 references indexed in Scilit:
- Plasma cleaning of beamline optical components: Contamination and gas composition effectsReview of Scientific Instruments, 1992
- Deposition of carbon on gold using synchrotron radiationNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1990
- In situ dc oxygen-discharge cleaning system for optical elementsReview of Scientific Instruments, 1989
- In situ reactive glow discharge cleaning of x-ray optical surfacesReview of Scientific Instruments, 1987
- Maximum-efficiency transmission grating profiles for metals in the soft X-ray rangeNuclear Instruments and Methods in Physics Research, 1983