Abstract
SUMMARY: In secondary and scanning transmission electron microscopes, secondary electron images of surface films can be dominated by an image derived from electrons back‐scattered from the interface between the film and the substrate. The extent of the domination has been established by studying the variation in image obtained using primary beams of different energy and by platinum coating to enhance surface secondary electron emission.Studies of thicker films also established that chemical or structural difference within a film also lead to imaging effects. In general, 5 keV electrons are the most effective in producing subsurface and structural or chemical imaging effects.