Using Patterns in Microfiche as Photomasks in 10-μm-Scale Microfabrication
- 16 June 1999
- journal article
- research article
- Published by American Chemical Society (ACS) in Langmuir
- Vol. 15 (19) , 6575-6581
- https://doi.org/10.1021/la990372p
Abstract
No abstract availableKeywords
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