Peer Reviewed: Silicon Micromachining: Sensors to Systems
- 1 July 1996
- journal article
- research article
- Published by American Chemical Society (ACS) in Analytical Chemistry
- Vol. 68 (13) , 407A-412A
- https://doi.org/10.1021/ac961977i
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Deformable-Mirror Spatial Light ModulatorsPublished by SPIE-Intl Soc Optical Eng ,1990