On the formation of binary compounds in Au/InP system
- 1 August 1981
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 52 (8) , 5112-5117
- https://doi.org/10.1063/1.329410
Abstract
The formation and identification of binary compounds in Au-InP system has been reported. The contact reaction was investigated in the temperature range 320–360 °C by the combined use of 2-MeV He+ ions backscattering spectrometry, x-ray diffraction, TEM, and SEM. The results give evidence that both In and P form compounds with gold; formation of oxides has not been observed. A model of metallurgical structure of Au/InP contacts annealed at temperatures below or equal to 360 °C has been proposed.This publication has 5 references indexed in Scilit:
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