Front-end design issues in soft-x-ray projection lithography
- 1 December 1993
- journal article
- research article
- Published by Optica Publishing Group in Applied Optics
- Vol. 32 (34) , 7050-7056
- https://doi.org/10.1364/ao.32.007050
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 2 references indexed in Scilit:
- Condenser optics, partial coherence, and imaging for soft-x-ray projection lithographyApplied Optics, 1993
- Commissioning of aurora: The smallest synchrotron light sourceJournal of Vacuum Science & Technology B, 1990