Condenser optics, partial coherence, and imaging for soft-x-ray projection lithography
- 1 December 1993
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 32 (34) , 6938-6944
- https://doi.org/10.1364/ao.32.006938
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
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