Slit extraction type compact microwave ion source
- 1 February 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 37-38, 159-162
- https://doi.org/10.1016/0168-583x(89)90158-4
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Axial magnetic field extraction-type microwave ion source with a permanent magnetReview of Scientific Instruments, 1984
- Technology and applications of broad-beam ion sources used in sputtering. Part I. Ion source technologyJournal of Vacuum Science and Technology, 1982
- Non-mass-analyzed ion implantation from a solid phosphorus sourceApplied Physics Letters, 1982
- Focused ion beam designs for sputter depositionJournal of Vacuum Science and Technology, 1979