Difficulties associated with the measurement of the thickness of thin evaporated films
- 1 October 1964
- Vol. 14 (10) , 395
- https://doi.org/10.1016/0042-207x(64)90477-4
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- A survey of methods of measuring thin film thicknesses and surface irregularitiesMicroelectronics Reliability, 1963