Temperature Measurement and Control in a Rapid Thermal Processor

Publisher Website

1 January 1985

journal article
Published by Springer Nature in MRS Proceedings

Vol. 52
https://doi.org/10.1557/proc-52-191

Abstract

No abstract available

Keywords

This publication has 2 references indexed in Scilit:

New Reliable Structure for High Temperature Measurement of Silicon Wafers Using a Specially Attached Thermocouple
MRS Proceedings, 1983
Spectral Emissivity of Silicon
Japanese Journal of Applied Physics, 1967