Hot-Wire Deposited Amorphous Silicon Thin-Film Transistors
- 1 January 1996
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- a-Si:H solar cells deposited by the hot wire methodAIP Conference Proceedings, 1994
- Deposition of device quality a-Si:H films with the hot-wire techniqueJournal of Non-Crystalline Solids, 1993
- Properties of hydrogenated amorphous silicon produced at high temperatureAIP Conference Proceedings, 1992
- Deposition of device quality, low H content amorphous siliconJournal of Applied Physics, 1991
- Deposition of device quality, low H content a-Si:H by the hot wire techniqueJournal of Non-Crystalline Solids, 1991
- Characteristics of amorphous silicon staggered-electrode thin-film transistorsApplied Physics Letters, 1984