Monolithic integrated-optic position/displacement sensor using waveguide gratings and QW-DFB laser
- 1 October 1995
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 7 (10) , 1195-1197
- https://doi.org/10.1109/68.466588
Abstract
A monolithic fully-integrated interferometer position/displacement sensor is proposed. The device is implemented with waveguide grating components, a GRIN SCH SQW DFB laser and photodiodes. A prototype device of 6.5/spl times/2.0 mm/sup 2/ chip size and 0.4/spl times/0.4 mm/sup 2/ sensing beam aperture is fabricated, and the sensor operation of submicron resolution is demonstrated.Keywords
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