An out-of-plane polysilicon actuator with a smooth vertical mirror for optical fiber switch application
- 27 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. II/33-II/34
- https://doi.org/10.1109/leosst.1998.689718
Abstract
Micromachined optical switches are under intensive study for optical communication networks. Some of them require special high aspect-ratio technologies such as LIGA and deep RIE. Some are a few millimeters in size. We have designed a 2/spl times/2 micro optical switch which is micro-meters in size, fully micromachined except for one step, and has a simple mechanism because of electrostatic actuation.Keywords
This publication has 3 references indexed in Scilit:
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- An electromagnetic MEMS 2×2 fiber optic bypass switchPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002