A Novel Micromechanical Temperature Memory Sensor
- 25 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 132-135
- https://doi.org/10.1109/sensor.1995.721762
Abstract
A novel, microfabricated silicon device capable of recording extreme hot and cold temperature exposures without a need for electrical power is presented. The device functions as a mechanically-induced, one-bit memory cell that utilizes the bimetallic effect in a latching mechanism consisting of two cantilever beams that overlap each other near the tips. Devices were fabricated using silicon micromachining and were tested as a function of temperature. A finite element model of the device was developed and simulations are shown to agree with test results.Keywords
This publication has 4 references indexed in Scilit:
- A bistable snapping microactuatorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Analysis of tip deflection and force of a bimetallic cantilever microactuatorJournal of Micromechanics and Microengineering, 1993
- A latching accelerometer fabricated by the anisotropic etching of (110) oriented silicon wafersJournal of Micromechanics and Microengineering, 1992
- Thermally excited silicon microactuatorsIEEE Transactions on Electron Devices, 1988