Kinetics of the nitridation of magnesium in a glow discharge
- 1 May 1976
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 34 (1) , 145-147
- https://doi.org/10.1016/0040-6090(76)90153-x
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Thermal Nitridation of Magnesium at Lower Temperatures and Pressures of the Nitrogen AtmosphereJournal of the Electrochemical Society, 1974
- The Anodization of Si in an RF PlasmaJournal of the Electrochemical Society, 1973
- Plasma Anodization of Metals and SemiconductorsJournal of Vacuum Science and Technology, 1970
- Silicon Oxide Films Grown in a Microwave DischargeJournal of Applied Physics, 1967
- Silicon Oxidation in an Oxygen Plasma Excited by MicrowavesJournal of Applied Physics, 1965