75% efficient wide bandwidth grating couplers in a 45 nm microelectronics CMOS process
- 1 April 2015
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- No. 23768665,p. 46-47
- https://doi.org/10.1109/oic.2015.7115679
Abstract
We present the design and characterization of highly directional vertical grating couplers achieving -1.2 dB coupling efficiency with 78nm 1- dB bandwidth realized in a commercially available 45nm microelectronics SOI process.Keywords
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