Open foundry platform for high-performance electronic-photonic integration
Top Cited Papers
- 15 May 2012
- journal article
- Published by Optica Publishing Group in Optics Express
- Vol. 20 (11) , 12222-12232
- https://doi.org/10.1364/oe.20.012222
Abstract
This paper presents photonic devices with 3 dB/cm waveguide loss fabricated in an existing commercial electronic 45 nm SOI-CMOS foundry process. By utilizing existing front-end fabrication processes the photonic devices are monolithically integrated with electronics in the same physical device layer as transistors achieving 4 ps logic stage delay, without degradation in transistor performance. We demonstrate an 8-channel optical microring-resonator filter bank and optical modulators, both controlled by integrated digital circuits. By developing a device design methodology that requires zero process infrastructure changes, a widely available platform for high-performance photonic-electronic integrated circuits is enabled.Keywords
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