X-ray diffraction reciprocal space mapping of a GaAs surface grating
- 5 April 1993
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 62 (14) , 1623-1625
- https://doi.org/10.1063/1.108606
Abstract
A GaAs surface grating (period 574 nm) is analyzed by four crystal-six reflection x-ray diffraction. Two-dimensional measurements in the vicinity of the 004 GaAs reciprocal lattice point show satellites in the transverse direction related to the periodicity of the grating. A cross pattern, centered on the 004 GaAs reciprocal lattice point, is formed by these satellites. An explanation is given by a model which includes the influence of transmission through the surface pattern on the substrate diffraction.Keywords
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