RIKEN 200 KV high current implanter for metal surface modification
- 1 January 1985
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 6 (1-2) , 51-55
- https://doi.org/10.1016/0168-583x(85)90609-3
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Surface layer characteristics of ion-implanted metalsThin Solid Films, 1983
- Production of high-current metal ion beamsNuclear Instruments and Methods in Physics Research, 1981
- Sputtering observations during binary alloy production by ion implantationNuclear Instruments and Methods, 1981
- Microwave ion source for high-current implanterReview of Scientific Instruments, 1978
- Annealing and rolling behaviors of concentration profiles of Cr and Cu implanted into mild steelJournal of Vacuum Science and Technology, 1978