An open-loop spectroscopy for quantitative waveform measurements with the scanning electron microscope
- 1 April 1985
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 18 (4) , 284-285
- https://doi.org/10.1088/0022-3735/18/4/008
Abstract
A retarding field energy analyser system for quantitative waveform measurement which uses no feedback loop is described. The system, which is controlled with a minicomputer, allows one to sample and store the retarding curves (S-curves) at each stroboscopic sampling phase. By reading the retarding voltages at an arbitrarily specified traverse position of the S-curves, a quantitative relation between the specimen voltage and the sampling phase can be obtained.Keywords
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