A technique for the linearization of voltage contrast in the scanning electron microscope
- 1 April 1971
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 4 (4) , 334-336
- https://doi.org/10.1088/0022-3735/4/4/027
Abstract
A technique for the linearization of voltage contrast in the scanning electron microscope is outlined using a target cage arrangement in conjunction with a feedback loop. Experimental results on a GaAs transverse device are presented.Keywords
This publication has 3 references indexed in Scilit:
- AUGER ELECTRON SPECTROSCOPY IN SCANNING ELECTRON MICROSCOPY: POTENTIAL MEASUREMENTSApplied Physics Letters, 1970
- Isolation of potential contrast in the scanning electron microscopeJournal of Physics E: Scientific Instruments, 1969
- Voltage measurement in the scanning electron microscopeJournal of Physics E: Scientific Instruments, 1968