Valency Control of Glow Discharge Produced a-SiC:H and its Application to Heterojunction Solar Cells

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Abstract
A new type of amorphous silicon solar cell having a conversion efficiency of 8% level is introduced. The cell has a wide band gap window layer made of hydrogenated amorphous silicon carbide, (a-SiC:H), with a good valency control. Electrical, optical and optoelectronic properties of a-SiC:H have been investigated, together with their valency controllability. A design concept and some key technologies to improve solar cell performance with this new material are demonstrated. A series of technical data on material preparation and cell performance are presented. Clear improvements in cell performance, not only IDC but also VDC, have been obtained. The realistic limit of the conversion efficiency in a-Si solar cells is estimated and discussed.