Scanning tunneling microscopy study on void formation by thermal decomposition of thin oxide layers on stepped Si surfaces
- 15 April 1998
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 83 (8) , 4091-4095
- https://doi.org/10.1063/1.367162
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
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