Dependence of oxygen flow on optical and electrical properties of DC-magnetron sputtered ITO films
- 1 August 1998
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 326 (1-2) , 72-77
- https://doi.org/10.1016/s0040-6090(98)00521-5
Abstract
No abstract availableKeywords
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