Controlling Structural Evolution by VHF Power Profiling Technique for High-efficiency Microcrystalline Silicon Solar Cells at High Deposition Rate
- 1 January 2009
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Improved transport properties of microcrystalline silicon films grown by HWCVD with a variable hydrogen dilution processThin Solid Films, 2008
- The compact microcrystalline Si thin film with structure uniformity in the growth direction by hydrogen dilution profileJournal of Applied Physics, 2005
- Microcrystalline silicon solar cells deposited at high ratesJournal of Applied Physics, 2005
- Hydrogen dilution profiling for hydrogenated microcrystallinesilicon solar cellsApplied Physics Letters, 2004
- Defect density and recombination lifetime in microcrystalline silicon absorbers of highly efficient thin-film solar cells determined by numerical device simulationsJournal of Applied Physics, 2003
- Ion bombardment effects on microcrystalline silicon growth mechanisms and on the film propertiesJournal of Applied Physics, 2003
- Thickness dependence of microcrystalline silicon solar cell propertiesSolar Energy Materials and Solar Cells, 2001
- High rate growth of microcrystalline silicon at low temperaturesJournal of Non-Crystalline Solids, 2000