Patterning of Nanoporous Anodic Aluminum Oxide Arrays by Using Sol−Gel Processing, Photolithography, and Plasma Etching
- 28 January 2004
- journal article
- research article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 16 (4) , 682-687
- https://doi.org/10.1021/cm034553v
Abstract
No abstract availableKeywords
This publication has 18 references indexed in Scilit:
- Growth of Patterned Nanopore Arrays of Anodic Aluminum OxideAdvanced Materials, 2003
- Fabrication and Characteristics of Ordered Ni Nanostructures on Glass by Anodization and Direct Current ElectrodepositionChemistry of Materials, 2002
- Monodisperse Mesoporous Silica Microspheres Formed by Evaporation-Induced Self Assembly of Surfactant Templates in AerosolsAdvanced Materials, 2002
- Materials in nanoporous aluminaJournal of Materials Chemistry, 2002
- Synthesis and Characterization of Titania Nanostructures on Glass by Al Anodization and Sol−Gel ProcessChemistry of Materials, 2002
- Self-ordered pore structure of anodized aluminum on silicon and pattern transferApplied Physics Letters, 2000
- Orthogonal Self-Assembly on Colloidal Gold-Platinum NanorodsAdvanced Materials, 1999
- Preparation of regularly structured porous metal membranes with two different hole diameters at the two sidesThin Solid Films, 1996
- Fabrication of Gold Nanodot Array Using Anodic Porous Alumina as an Evaporation MaskJapanese Journal of Applied Physics, 1996
- Fabrication and Evaluation of Nanoelectrode EnsemblesAnalytical Chemistry, 1995