Growth of Patterned Nanopore Arrays of Anodic Aluminum Oxide
- 3 December 2003
- journal article
- research article
- Published by Wiley in Advanced Materials
- Vol. 15 (23) , 2015-2018
- https://doi.org/10.1002/adma.200305360
Abstract
An inexpensive procedure to fabricate highly ordered, patterned through‐hole nanopore arrays of anodic aluminum oxide (AAO, see Figure) with intermittent aluminum supports has been developed. Silica was used as the anodization barrier. Using a two‐step anodization process, straight nanopores of AAO are formed in the unpatterned areas; no pores are found in the patterned areas.Keywords
This publication has 24 references indexed in Scilit:
- Ordered Mosaic Nanocomposites in Anodic Porous AluminaAdvanced Materials, 2003
- A Highly Regular Two-Dimensional Array of Au Quantum Dots Deposited in a Periodically Nanoporous GaAs Epitaxial LayerAdvanced Materials, 2002
- Physics and Applications of Microfluidics in BiologyAnnual Review of Biomedical Engineering, 2002
- “Smart” Glasses: Molecular Programming of Rapid Dynamic Responses in Organosilica Sol-GelsAdvanced Materials, 2002
- Ideally Ordered Anodic Porous Alumina Mask Prepared by Imprinting of Vacuum-Evaporated Al on SiJapanese Journal of Applied Physics, 2001
- Electrochemical Fabrication of Highly Ordered Semiconductor and Metallic Nanowire ArraysChemistry of Materials, 2001
- Optically Defined Multifunctional Patterning of Photosensitive Thin-Film Silica MesophasesScience, 2000
- On the Growth of Highly Ordered Pores in Anodized Aluminum OxideChemistry of Materials, 1998
- Single Electron Device with Asymmetric Tunnel BarriersJapanese Journal of Applied Physics, 1996
- Ordered Metal Nanohole Arrays Made by a Two-Step Replication of Honeycomb Structures of Anodic AluminaScience, 1995