Crossed fluxes technique for pulsed laser deposition of smooth YBa2Cu3O7−x films and multilayers
- 23 August 1993
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 63 (8) , 1146-1148
- https://doi.org/10.1063/1.110773
Abstract
A system with two interacting plasma fluxes for the deposition of high‐temperature superconductor films is presented. This system prevents the appearance of particles on a film surface, and permits one to obtain YBa2Cu3O7−x films with the surface defect concentration as low as 104 cm−2, a high critical temperature of 90 K, and a critical current density of 4×106 A/cm2 at 77 K. It is shown that high morphological quality films are obtained at a specific target‐substrate distance.Keywords
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