Experimental study of laser formed connections for LSI wafer personalization
- 1 August 1975
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Journal of Solid-State Circuits
- Vol. 10 (4) , 219-228
- https://doi.org/10.1109/jssc.1975.1050597
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
- Connections and disconnections on integrated circuits using nanosecond laser pulsesApplied Physics Letters, 1975
- Laser formed connections for integrated circuit chip personalizationPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1974
- Materials processing with lasersIEEE Spectrum, 1972
- Metallurgical properties and electrical characteristics of palladium silicide-silicon contactsSolid-State Electronics, 1971
- Fast Modulator for Extraction of Internal Laser PowerJournal of Applied Physics, 1970
- Lasers in industryProceedings of the IEEE, 1969
- Laser Machining of Thin Films and Integrated CircuitsBell System Technical Journal, 1968