Transition from Linear to Nonlinear Sputtering of Solid Xenon
- 14 August 1995
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 75 (7) , 1407-1410
- https://doi.org/10.1103/physrevlett.75.1407
Abstract
Self-sputtering of solid xenon has been studied with molecular dynamics simulations as a model system for the transition from dominantly linear to strongly nonlinear effects. The simulation covered the projectile energy range from 20 to 750 eV. Within a relatively narrow range from 30 to 250 eV, nonlinear features such as high collision densities in the sputtering volume, amorphization of the crystalline structure, and an enhanced emission of low-energy atoms occur gradually.Keywords
This publication has 18 references indexed in Scilit:
- keV-atom bombardment of condensed rare gases: molecular dynamics simulationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993
- Sputtering of solid neon and argon by medium mass ions: Association Euratom-Risø National LaboratoryNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1992
- Sputtering yields and energy distributions from nonoverlapping subspikes in ion bombarded volatile solidsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1992
- Spikes in condensed rare gases induced by keV-atom bombardmentPhysical Review Letters, 1991
- Sputtering of Volatile Solids from Nonoverlapping SubspikesEurophysics Letters, 1990
- Sputtering yields of condensed rare gasesNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1990
- Mechanisms for the desorption of large organic moleculesInternational Journal of Mass Spectrometry and Ion Processes, 1987
- Temperature-dependent sputtering of metals and insulatorsApplied Physics A, 1984
- Sputtering from elastic-collision spikes in heavy-ion-bombarded metalsJournal of Applied Physics, 1981
- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969