Numerical method for the ellipsometric determination of optical constants and thickness of thin films with microcomputers
- 31 December 1988
- journal article
- Published by Elsevier in Surface Science
- Vol. 197 (1-2) , 339-345
- https://doi.org/10.1016/0039-6028(88)90589-4
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Method for numerical inversion of the ellipsometry equation for transparent filmsJournal of the Optical Society of America, 1983
- Ellipsometer Data Analysis with a Small Programmable Desk CalculatorApplied Optics, 1972
- Determination of the Properties of Films on Silicon by the Method of EllipsometryJournal of the Optical Society of America, 1962