Method for numerical inversion of the ellipsometry equation for transparent films
- 1 July 1983
- journal article
- Published by Optica Publishing Group in Journal of the Optical Society of America
- Vol. 73 (7) , 888-891
- https://doi.org/10.1364/josa.73.000888
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 10 references indexed in Scilit:
- Distribution of nitrogen in thermally nitrided SiO2Journal of Vacuum Science & Technology B, 1983
- Ellipsometric method for separate measurements of n and d of a transparent filmApplied Optics, 1975
- Design and Operation of ETA, an Automated EllipsometerIBM Journal of Research and Development, 1973
- Optical characterization of thin films: TheoryJournal of the Optical Society of America, 1973
- Ellipsometer Data Analysis with a Small Programmable Desk CalculatorApplied Optics, 1972
- Generalized Ellipsometric Method for the Absorbing Substrate Covered with a Transparent-Film System Optical Constants of Silicon at 3655 Å*Journal of the Optical Society of America, 1972
- Simultaneous and Independent Determination of the Refractive Index and the Thickness of Thin Films by Ellipsometry*Journal of the Optical Society of America, 1968
- Thickness Calculations for a Transparent Film from Ellipsometric Measurements*Journal of the Optical Society of America, 1968
- Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometryJournal of Research of the National Bureau of Standards Section A: Physics and Chemistry, 1963
- Determination of the Properties of Films on Silicon by the Method of EllipsometryJournal of the Optical Society of America, 1962