Electro-mechanically tunable micro Fabry-Perot filter array
- 1 January 1995
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 128-129
- https://doi.org/10.1109/drc.1995.496298
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Surface micromachined tuneable interferometer arraySensors and Actuators A: Physical, 1994
- Deformable-Mirror Spatial Light ModulatorsPublished by SPIE-Intl Soc Optical Eng ,1990
- Miniature micromachined Fabry-Perot interferometers in siliconElectronics Letters, 1987