Characterization of PTFE on Silicon Wafer Tribological Transfer Films by XPS, Imaging XPS and AFM
- 1 March 1996
- journal article
- research article
- Published by Wiley in Surface and Interface Analysis
- Vol. 24 (3) , 204-210
- https://doi.org/10.1002/(sici)1096-9918(199603)24:3<204::aid-sia90>3.0.co;2-c
Abstract
No abstract availableKeywords
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