Mechanical properties of SU-8
- 1 January 1998
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMSSensors and Actuators A: Physical, 1998
- A new technique for measuring the mechanical properties of thin filmsJournal of Microelectromechanical Systems, 1997
- Micromachining applications of a high resolution ultrathick photoresistJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1995