In-Plane UV Absorbance Detection in Silicon-Based Electrophoresis Devices Using Monolithically Integrated Optical Waveguides
- 1 January 2001
- book chapter
- Published by Springer Nature
Abstract
No abstract availableKeywords
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- Evanescent wave sensing: new features for detection in small volumesSensors and Actuators A: Physical, 2000
- Annealing of plasma silicon oxynitride filmsJournal of Applied Physics, 1986