Grazing-incidence diffraction from multilayers

Abstract
Grazing-incidence diffraction from superlattices has been described by a distorted-wave Born approximation. Using the example of a GaAs/AlAs superlattice, the influence of specular interface reflection on the diffraction pattern has been investigated experimentally and well explained by the theoretical treatment. A comparison with the dynamical theory and parallels with the x-ray reflectivity is given. Real-structure effects such as misorientation, interface roughness, or graduated heterotransitions have also been taken into consideration.