Roughness measurements by spectroscopic ellipsometry
- 15 November 1985
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 24 (22) , 3773-3779
- https://doi.org/10.1364/ao.24.003773
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 29 references indexed in Scilit:
- Theory of light scattering from a rough surface with an inhomogeneous dielectric permittivityPhysical Review B, 1984
- Spectroscopic Ellipsometry Study of rf-Sputtered a-Ge FilmsMRS Proceedings, 1984
- Characterization of Ion Implanted Silicon by Spectroscopic Ellipsometry and Cross Section Transmission Electron MicroscopyMRS Proceedings, 1983
- Stylus profiling instrument for measuring statistical properties of smooth optical surfacesApplied Optics, 1981
- Investigation of effective-medium models of microscopic surface roughness by spectroscopic ellipsometryPhysical Review B, 1979
- Study of Al with a combined Auger electron spectrometer–ellipsometer systemJournal of Vacuum Science and Technology, 1976
- Light scattering from rough surfacesPhysical Review B, 1975
- Calculation of the ellipsometric parameters characterizing a randomly rough surface by means of the Stratton-Chu-Silver integralOptics Communications, 1973
- Optical Constants of Aluminum Films Related to the Vacuum EnvironmentJournal of the Optical Society of America, 1970
- Reflection of electromagnetic waves from slightly rough surfacesCommunications on Pure and Applied Mathematics, 1951