A thermally-excited silicon accelerometer
- 1 May 1989
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 17 (1-2) , 241-245
- https://doi.org/10.1016/0250-6874(89)80086-1
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Silicon in mechanical sensorsJournal of Physics E: Scientific Instruments, 1988
- Miniature silicon resonant pressure sensorIEE Proceedings D Control Theory and Applications, 1988
- Electrothermally excited silicon beam mechanical resonatorsElectronics Letters, 1987