A programmable electrochemical biosensor array in 0.18μm standard CMOS
- 30 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 564-617 Vol. 1
- https://doi.org/10.1109/isscc.2005.1494120
Abstract
A 10/spl times/5 electrochemical biosensor array is designed and fabricated in standard 0.18 /spl mu/m CMOS. Each pixel occupies 160/spl times/120 /spl mu/m/sup 2/ and contains a programmable sensor capable of performing differential impedance spectroscopy, amperometric analysis, and field-effect sensing for molecular biology applications.Keywords
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