Effect of substrate on the Surface Acoustic Wave transduction on PZT film

Publisher Website
Google Scholar
Abstract
The Surface Acoustic Wave (SAW) velocity ‘v’ and coupling coefficient ‘k’ have been calculated as a function of the normalized thickness for lead zirconate titante (PZT) films on sapphire, silicon, glass (fused quartz) and conducting glass substrates. The interdigital transducers (IDT) have been taken on top of the film, and the reported elastic and piezoelectric constants of PZT (52/48) ceramic have been used. The SAW velocity decreases with increasing thickness ‘h’ of the film and becomes equal to the bulk velocity of PZT for h/Λ ∼ 0.7 (where Λ is the wavelength) for all the substrates. ‘k’ increases with increasing thickness of the film on silicon and glass substrate and becomes almost independent of film thickness for h/Λ ∼ 0.7. The ‘k’ value is low (0.098) for h/Λ ∼ 0.15, as compared to saturation value 0.1949. However, on sapphire and conducting glass, the ‘k’ values shows a peak (0.1) for h/Λ ∼ 0.075 and then increases with increasing thickness for h/Λ > 0.15, similar to that for silicon and glass substrate. The reported data of PZT films on sapphire and conducting glass are close to the peak value of ‘k'around h/Λ ∼ 0.075.

This publication has 3 references indexed in Scilit: