Back-scattering study of heavy-ion distribution in semiconductors
- 1 December 1973
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 19 (2) , 399-406
- https://doi.org/10.1016/0040-6090(73)90076-x
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education
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