Diamond-like carbon films deposited by laser ablation using frozen acetylene targets
- 15 September 1995
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 78 (6) , 4267-4269
- https://doi.org/10.1063/1.359891
Abstract
A new laser ablation method based on frozen gas targets was tested by depositing carbon films. The source gas was acetylene. With an ArF laser at a power density of 9×108 W/cm2 the deposition rate varied from 17 nm/min at room temperature to 13 nm/min at a substrate temperature of 300 °C. The films showed the broad Raman peak at 1540 cm−1 characteristic of diamond-like carbon films. A KrF laser produced the diamond-like carbon films at substrate temperatures above 200 °C. Particles were absent in the films if the power density was not excessively high. Energetic species ejected from frozen acetylene improved the adherence of the films to quartz substrates.This publication has 19 references indexed in Scilit:
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