ASEP: a CAD program for silicon anisotropic etching
- 1 June 1991
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 28 (1) , 71-78
- https://doi.org/10.1016/0924-4247(91)80009-e
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Very high Q-factor resonators in monocrystalline siliconSensors and Actuators A: Physical, 1990