Very high Q-factor resonators in monocrystalline silicon
- 1 February 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 21 (1-3) , 323-327
- https://doi.org/10.1016/0924-4247(90)85064-b
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
- Resonant silicon structuresSensors and Actuators, 1989
- Sensitivity and mode spectrum of a frequency-output silicon pressure sensorSensors and Actuators, 1988
- Optically Excited And Interrogated Micromechanical Silicon Cantilever StructurePublished by SPIE-Intl Soc Optical Eng ,1987
- Micromachining of silicon mechanical structuresJournal of Vacuum Science & Technology B, 1985
- Etched silicon vibrating sensorJournal of Physics E: Scientific Instruments, 1984
- Resonant diaphragm pressure measurement system with ZnO on Si excitationSensors and Actuators, 1983
- Silicon as a mechanical materialProceedings of the IEEE, 1982
- The theory of oscillating-vane vacuum gaugesVacuum, 1966